Research project

CORNERSTONE

Project overview

This proposal seeks funding to acquire a refurbished stepper and associated wafer coater, tools to enable photolithographic patterning of semiconductor wafers for device and circuit fabrication. The stepper will be located at Southampton University in the recently opened £120m cleanroom complex. It will effectively increase the capacity of the cleanroom complex, which will in turn facilitate and underpin a wealth of world class research.
Not only will research at Southampton be enhanced, but Southampton (SOU), Glasgow (GLA), and Surrey (SUR) universities will pool resources to establish a Silicon Photonics Fabrication Capability within the UK, to satisfy an increasing demand for the fabrication of Silicon Photonics devices from the UK’s premier researchers. This will encourage wider usage of world class equipment within the UK, in line with EPSRC policy.
We seek funding for both the equipment and 3.5 RAs across the 3 institutions, over a 4 year period, to establish the Capability. Access to a very significant inventory of additional equipment at these 3 universities will be facilitated.
The project is extremely timely, as silicon foundry services around the world are moving towards a model in which standard platforms and devices will be offered, making it almost impossible for researchers to carry out innovative work at the device level, or in non-standard platforms.

Staff

Lead researchers
Other researchers

Professor Frederic Gardes PhD

Professor
Connect with Frederic

Professor Goran Mashanovich

Personal Chair

Research interests

  • Silicon Photonics
  • Photonics Integrated Circuits
  • Sensors
Connect with Goran

Professor Harold Chong

Professor of Electronic Engineering
Connect with Harold

Collaborating research institutes, centres and groups

Research outputs

Bigeng Chen, Roman Bruck, Daniel Traviss, Ali Z. Khokhar, Scott Reynolds, David J. Thomson, Goran Z. Mashanovich, Graham T. Reed & Otto L. Muskens, 2017, Nano Letters, 18(1), 610-617
Type: article
Daniel Perez, Ivana Gasulla, Francisco Javier Fraile, Lee Crudgington, David Thomson, Ali Khokhar, Ke Li, Wei Cao, Goran Mashanovich & Jose Capmany, 2017, Laser & Photonics Reviews
Type: article
Milos Nedeljković, Jordi Soler Penadés, Vinita Mittal, Ganapathy Senthil Murugan, Ali Z. Khokhar, Callum Littlejohns, Lewis G. Carpenter, Corin B. E. Gawith, James S. Wilkinson & Goran Z. Mashanovich, 2017, Optics Express, 25(22), 27431-27441
Type: article
Kapil Debnath, Marco Clementi, Thalía Domínguez Bucio, Ali Khokhar, Moise Sotto, Katarzyna M. Grabska, Daniele Bajoni, Matteo Galli, Shinichi Saito & Frederic Y. Gardes, 2017, Optics Express, 25(22), 27334-27340
Type: article
Tiantian Li, Miloš Nedeljković, Nannicha Hattasan, Ali Z. Khokhar, Scott A. Reynolds, Stevan Stanković, Mehdi Banakar, Wei Cao, Zhibo Qu, Callum G. Littlejohns, Jordi Soler Penadés, Katarzyina Grabska, Lorenzo Mastronardi, David J. Thomson, Frederic Y. Gardes, Graham T. Reed, Hequan Wu, Zhiping Zhou & Goran Z. Mashanovich, 2017
Type: conference