Module overview
The module will discuss all important issues related to scaling down the transistor size into the nanometer regime, such as high-k dielectrics and FINFETs. The teaching will be complemented with a finite element simulation of the MOS scaling which will bring into practice many of the above improvements. Silvaco TCAD tools are used: industry-standard software to simulate semiconductor processing and device operation (Technology Computer-Aided Design).
Linked modules
Pre-requisite: ELEC2201