Research project

Compact imaging system for semiconductor inspection based on metalenses

Staff

Lead researchers

Dr Bruce (Jun-Yu) Ou

Associate Professor

Research interests

  • Metalens for imaging and metrology
  • AI for nanoimaging
  • Nano-optomechanics
Connect with Bruce (Jun-Yu)

Research outputs

Yu Wang, Eng Aik Chan, Carolina Rendon-Barraza, Yijie Shen, Eric Plum & Bruce (Jun-Yu) Ou, 2024, Advanced Science
Type: article